This paper proposes a general applicable numerical technique for the simulation of three-dimensional (3D) electrode shape changes obtained during the electroplating processes. The shape of the electrode is found displacing each mesh node proportional with, and in the direction of the local current density according to Faraday’s law. The local growth rate is obtained solving numerically the potential model using Boundary Element Method (BEM). An example dealing with the 3D simulation of electroplating near an insulator (singularity) is presented and compared with measurements and twodimensional (2D) simulations

Keywords: Electroplating, 3D modeling, Electrode shape change, Potential model, Boundary element method