The on-going reduction of feature size and the increase of variability are the main characteristics of today’s integrated circuits. Certain variability effects previously considered negligible, now should be taken into account. Handling variability during the modelling procedure is an important topic and requires a great amount of research. The key solution of this problem is to build a parametric model of the device. This paper proposes new and efficient parametric models for interconnects modelled as transmission lines. The novelty consists of the parameterization of the longitudinal line parameters with respect to geometric transversal dimensions, subject to large or small variations. The models are based on the computation of first order sensitivities. The paper is focused on the simultaneously variation of multiple parameters.

Keywords: Interconnections, Transmission lines, Parametric models, Sensitivity