A simplified 3 D model, taking into account the longitudinal propagation only, has been used for the validation of material parameters values. The results, obtained building the stack layer by layer, agree very well with those computed using the analytical 1D multilayer Mason model. A 3D model taking into account the lateral propagation too, considering various approximations for the mechanical boundary conditions has been used, showing that the simulated lateral modes are more accentuated than the measured ones. Some aspects of the future research are pointed out.

Keywords: Power BAW resonators, 3D models